Surface figure metrology based on geometric phase components

K.-N. Joo; H. M. Park; H. B. Jeong; C. E. Guthery; D. Kim; Y. S. Ghim

doi:10.1117/12.2624872

20 May 2022 Surface figure metrology based on geometric phase components

K.-N. Joo, H. M. Park, H. B. Jeong, C. E. Guthery, D. Kim, Y. S. Ghim

Proceedings Volume 12137, Optics and Photonics for Advanced Dimensional Metrology II; 121370C (2022) https://doi.org/10.1117/12.2624872
Event: SPIE Photonics Europe, 2022, Strasbourg, France

Abstract

A geometric phase component is very attractive in optical metrology because its meta-surface characteristic enables traditional optical systems to be more compact and multi-functional. In this presentation, we introduce two types of geometric phase components, i.e. a geometric phase lens and a polarization grating in surface figure metrology. Their features of polarized beam splitting and phase retardation play a role of wavefront shearing device, and simple shearing interferometers can be designed. We focus on the instrumentation of a radial shearing interferometer using a geometric phase lens and a lateral shearing interferometer based on a polarization grating. With the aid of a polarization pixelated CMOS camera, each interferometer can provide the phase map corresponding to the sheared wavefront as a snapshot measurement. In the experiment, various wavefronts generated by a deformable mirror and shapes of several mirrors were measured and compared with other commercial devices.

Conference Presentation

Citation Download Citation

K.-N. Joo, H. M. Park, H. B. Jeong, C. E. Guthery, D. Kim, and Y. S. Ghim "Surface figure metrology based on geometric phase components", Proc. SPIE 12137, Optics and Photonics for Advanced Dimensional Metrology II, 121370C (20 May 2022); https://doi.org/10.1117/12.2624872

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