Ms. Audrey Berthoud Profile

Audrey Berthoud

at CEA-LETI

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Publications (1)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Detection and correlation of yield loss induced by color resist deposition deviation with a deep learning approach applied to optical acquisitions

Thomas Alcaire, Delphine Le Cunff, Jean-Hervé Tortai, Sebastien Soulan, Victor Gredy, Maxime Templier, Mehdi Kessar, Raffaele Bianchini, Audrey Berthoud

Proceedings Volume 11611, 116112G (2021) https://doi.org/10.1117/12.2582058

KEYWORDS: RGB color model, Semiconducting wafers, Statistical modeling, Metrology, Interferometry, Wafer-level optics, Reflectometry, Process control, Optical filters, Model-based design

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