Dr. Benjamin Voelker
at Karlsruher Institut für Technologie
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 25, 2008
Proc. SPIE. 6993, MEMS, MOEMS, and Micromachining III
KEYWORDS: Actuators, Mirrors, Multilayers, Electrodes, Silicon, Spatial light modulators, Micromirrors, Semiconducting wafers, Adhesives, Wafer bonding

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Oxides, Mirrors, Etching, Electrodes, Metals, Silicon, Micromirrors, Semiconducting wafers, Adhesives, Wafer bonding

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5715, Micromachining and Microfabrication Process Technology X
KEYWORDS: Oxides, Mirrors, Electrodes, Polymers, Silicon, Micromirrors, Aluminum, Semiconducting wafers, Adhesives, Wafer bonding

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top