Dr. David I. Pearson
at Oxford Instruments Plasma Technology Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | September 19, 2016
Proc. SPIE. 9974, Infrared Sensors, Devices, and Applications VI
KEYWORDS: Oxides, Vanadium, Thin films, Sputter deposition, Resistance, Oxygen, Ion beams, Thin film deposition, Semiconducting wafers, Oxidation

PROCEEDINGS ARTICLE | September 26, 2013
Proc. SPIE. 8816, Nanoengineering: Fabrication, Properties, Optics, and Devices X
KEYWORDS: Thin films, Contamination, Silica, Etching, Argon, Sputter deposition, Metals, Ions, Xenon, Ion beams

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