Dr. Martin Eibelhuber
Deputy Business Development at EV Group
SPIE Involvement:
Publications (9)

Proceedings Article | 25 May 2022 Presentation + Paper
Proceedings Volume 12054, 1205404 (2022) https://doi.org/10.1117/12.2613788
KEYWORDS: Distortion, Semiconducting wafers, Nanoimprint lithography, Overlay metrology, Standards development, Lithography, Data modeling

Proceedings Article | 20 May 2022 Presentation + Paper
A. Kneidinger, P. Schuster, C. Thanner, M. Eibelhuber
Proceedings Volume 12135, 1213509 (2022) https://doi.org/10.1117/12.2632072
KEYWORDS: Refractive index, Nanoimprint lithography, Semiconducting wafers, Micro optics, Manufacturing, Surface roughness, High volume manufacturing, Grayscale lithography

Proceedings Article | 29 March 2021 Presentation + Paper
Martin Eibelhuber, Christine Thanner, Dominik Treiblmayr, Sebastien Pochon, W. Frost, Joao Ferreira, David Pearson, Stephanie Baclet
Proceedings Volume 11765, 117650H (2021) https://doi.org/10.1117/12.2579505
KEYWORDS: Refractive index, Augmented reality, Waveguides, Nanoimprint lithography, Etching, Polymers, Glasses, Nanostructures, Photorefractive polymers, Optics manufacturing

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11610, 116100C (2021) https://doi.org/10.1117/12.2583631
KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Standards development, Scanning electron microscopy, Photoresist processing, Photonics, Optical lithography, Nanotechnology, Metrology, Lithography

Proceedings Article | 19 February 2020 Paper
Christine Thanner, Anna Dudus, Dominik Treiblmayr, G. Berger, M. Chouiki, Stephan Martens, Michael Jurisch, Julian Hartbaum, Martin Eibelhuber
Proceedings Volume 11310, 1131010 (2020) https://doi.org/10.1117/12.2543692
KEYWORDS: Nanoimprint lithography, Manufacturing, Augmented reality, Semiconducting wafers, Waveguides, Optics manufacturing, Electron beam lithography, Polymers, High volume manufacturing, Nanostructures

Showing 5 of 9 publications
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