Dr. Hung-Yang Chen Profile

Dr. Hung-Yang Chen

at EMD Performance Materials, Merck KGaA

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Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation

Sustainable solutions to PFAS photoacid generators used in chemically amplified resists

Daniela Carja, Hung-Yang Chen, Takayuki Sao, Hiroshi Hitokawa, Philipp-Hans Fackler, Chunwei Chen, Ralph Dammel

Proceedings Volume 12957, 1295703 (2024) https://doi.org/10.1117/12.3010645

KEYWORDS: Photoacid generators, Sustainability, Chemically amplified resists, Photoresist materials, Transparency, Photoresist developing, Lithography, Toxicity, Thermal stability, Structural design

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Proceedings Article | 9 April 2024 Poster + Paper

PFAS-free I-line strong photoacid generator for positive-tone and negative-tone thick-film photoresists

Hung-Yang Chen, Ionela-Daniela Carja, Chunwei Chen, Ashley Moore, Philipp Hans Fackler, Ralph Dammel

Proceedings Volume 12957, 129571H (2024) https://doi.org/10.1117/12.3009506

KEYWORDS: Photoresist materials, Photoacid generators, Copper, Silicon, Film thickness, Lithography, Semiconductors, Semiconducting wafers, Fabrication, Photoresist developing

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Proceedings Article | 1 May 2023 Poster + Paper

Profile control in conductor metal wet etch with advanced photoresists

Ashley Moore, Julia Modl, Zhong Li, Hung-Yang Chen, Chunwei Chen, Andreas Behrendt, Katharina Schmoelzer

Proceedings Volume 12498, 124981J (2023) https://doi.org/10.1117/12.2657687

KEYWORDS: Photoresist materials, Etching, Adhesion, Wet etching, Copper, Metals, Semiconducting wafers, Coating, Lithography, Photoresist developing

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