Dr. Jean-Louis Sanchez
at LAAS-CNRS
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | February 26, 2008
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Copper, Silicon, Resistance, Magnetism, Photoresist materials, Micromachining, Electroplating, Prototyping, Inductance, Chemical mechanical planarization

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI
KEYWORDS: Capacitors, Etching, Electrodes, Dielectrics, Ions, Silicon, Resistance, Capacitance, Deep reactive ion etching, Plasma

PROCEEDINGS ARTICLE | December 30, 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Optical lithography, Metals, Copper, Silicon, Manufacturing, Magnetism, Photoresist materials, CMOS technology, Photoresist processing, Electroplating

PROCEEDINGS ARTICLE | December 30, 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Oxides, Etching, Polymers, Silicon, Diffusion, Doping, Boron, Plasma etching, Reactive ion etching, Semiconducting wafers

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