Ms. Jeong-Soon Kim Profile

Jeong-Soon Kim

at Lasertec USA Inc

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Publications (1)

Proceedings Article | 21 November 2023 Presentation + Paper

Die-to-database inspections of optical patterned masks

Christopher Wieland, Kristy Kormondy, Annelise Beck, Britain Smith, Firoz Ghadiali, Jun Kim, Frank Abboud, Tetsuya Sendoda, Naonari Kondo, Tomohiro Imahoko, Jeoung Kim, Chikato Kaga, Arosha Goonesekera, Wonil Cho, Sankaranarayanan Paninjath, Saikiran Madhusudhan, Prakash Deep, Shivam Nln, Sasidhara Reddy, Ranganadh Peesapati

Proceedings Volume 12751, 1275105 (2023) https://doi.org/10.1117/12.2688267

KEYWORDS: Inspection, Defect inspection, Photomasks, Optical inspection, Semiconducting wafers, Printing, Image processing, Detection and tracking algorithms, Defect detection

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