Britain J. Smith
Senior Process Engineer at Intel Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | June 16, 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Oxides, Lithography, Optical lithography, Etching, Photomasks, Field effect transistors, Optical alignment, Reactive ion etching, Semiconducting wafers, Halogens

PROCEEDINGS ARTICLE | June 16, 2003
Proc. SPIE. 5037, Emerging Lithographic Technologies VII
KEYWORDS: Lithography, Statistical analysis, Data modeling, Etching, Silicon, Materials processing, Inspection, Oxygen, Polymerization, Semiconducting wafers

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