Dr. Kevin P. O'Brien Profile

Dr. Kevin P. O'Brien

at Intel Corp

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper

Advanced EUV patterning of 2D TMDs for CMOS integration

Vina Faramarzi, Etienne de Poortere, Syam Parayil Venugopalan, Pieter Woltgens, Youngtag Woo, Mark van de Kerkhof, Pawan Kumar, Henry Medina Silva, Pierre Morin, Inge Asselberghs, Chelsey Dorow, Kevin O'Brien, Kirby Maxey, Uygar Avci

Proceedings Volume 12956, 129560I (2024) https://doi.org/10.1117/12.3011818

KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Optical lithography, Photons, Electrons, 2D materials, Field effect transistors, Direct write lithography, Advanced patterning

Read Abstract +

Proceedings Article | 30 April 2023 Open Access

Are 2D transition metal dichalcogenides transistors the future silicon replacement or hype?

Kevin O'Brien

Proceedings Volume 12498, 1249802 (2023) https://doi.org/10.1117/12.2669891

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years