Mark Geniza
at Inpria Corporation
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 February 2021 Poster + Paper
Proceedings Volume 11612, 116120X (2021) https://doi.org/10.1117/12.2583842
KEYWORDS: Oxides, Metals, Extreme ultraviolet, Photoresist materials, Semiconducting wafers, Extreme ultraviolet lithography, Particles, Manufacturing, Chemically amplified resists

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