Dr. Aiwen Wu
Sr. Applications Manager at Entegris Inc
SPIE Involvement:
Publications (16)

Proceedings Article | 1 May 2023 Poster + Paper
Pranesh Muralidhar, Antonio Ramirez, Aiwen Wu, Lawrence Chen, Yamin Liu, Luxi Shen, Robert Blacksmith, Sabrina Wong, Matthew Melanson, Andrey Rudenko
Proceedings Volume 12498, 124981L (2023) https://doi.org/10.1117/12.2657698
KEYWORDS: Metals, Polymers, Tunable filters, Chromium, Contamination, Zinc, Photoresist materials, Iron, Calcium, Aluminum

Proceedings Article | 25 May 2022 Poster + Paper
Kusum Maharjan, Iou-Sheng Ke, Sabrina Wong, Aiwen Wu, Ying Qi, James Hamzik, Lawrence Chen
Proceedings Volume 12055, 120550V (2022) https://doi.org/10.1117/12.2614308
KEYWORDS: Metals, Iron, Optical lithography, Zinc, Calcium, Sodium, Aluminum, Magnesium, Copper

Proceedings Article | 22 February 2021 Poster + Paper
Proceedings Volume 11612, 116120X (2021) https://doi.org/10.1117/12.2583842
KEYWORDS: Oxides, Metals, Extreme ultraviolet, Photoresist materials, Semiconducting wafers, Extreme ultraviolet lithography, Particles, Manufacturing, Chemically amplified resists

Proceedings Article | 23 March 2020 Paper
Aiwen Wu, Hareen Bayana, Philippe Foubert, Andrea Chacko, Douglas Guererro
Proceedings Volume 11326, 113261Z (2020) https://doi.org/10.1117/12.2551647
KEYWORDS: Extreme ultraviolet, Coating, Particles, Semiconducting wafers, Extreme ultraviolet lithography, Silicon, Photoresist materials, Thin film coatings, Thin films, Polymers

Proceedings Article | 25 March 2019 Presentation + Paper
V. Goel, A. Wu, J. Braggin
Proceedings Volume 10960, 1096017 (2019) https://doi.org/10.1117/12.2514965
KEYWORDS: Particles, Chemistry, Lithography, Adsorption, Polymers

Showing 5 of 16 publications
Conference Committee Involvement (3)
Advances in Patterning Materials and Processes XL
27 February 2023 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIX
25 April 2022 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVIII
22 February 2021 | Online Only, California, United States
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