Mr. Myung-Chul Shin Profile

Myung-Chul Shin

at SAMSUNG Electronics Co Ltd

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Publications (2)

Proceedings Article | 27 April 2023 Presentation + Paper

Deep learning-based automatic defect classification for semiconductor manufacturing

Eunpa Kim, Myungchul Shin, Hee-Jun Ahn, Soyoon Park, Dong-ryul Lee, Haesung Park, Minjung Shin, Dongchul Ihm

Proceedings Volume 12496, 124961H (2023) https://doi.org/10.1117/12.2658638

KEYWORDS: Semiconductor manufacturing, Inspection, Image classification, Scanning electron microscopy, Deep learning, Semiconductors, Classification systems

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Proceedings Article | 27 April 2023 Presentation + Paper

A novel method for improving yield prediction by matching layout pattern and defect inspection

Min-Chul Han, Chang-Hun Ko, Cheol-Hwan Kim, Masayuki Terai, Hye-Sun Kim, Oh-Hun Kwon, Ji-Hyun Cheon, Jin-Woo Choi, Jung-Hoon Park, Kyu-Sul Park, Jae-Ho Pak, Do-Youn Park, Seung-Ryeol Oh, Min-Su Kim, Hyun-Woo Ryoo, Myung-Chul Shin, Bo-Tak Lim, Il-Mok Park, Hyuck-Joon Kwon, Yoon-Jong Song, Jung-Yun Choi, Gwan-Hyeob Koh, Hyung-Jong Ko, Yu-Gyun Shin

Proceedings Volume 12496, 124961N (2023) https://doi.org/10.1117/12.2656206

KEYWORDS: Semiconducting wafers, Defect inspection, Inspection, Yield improvement, Failure analysis, Electrical breakdown, Semiconductors, Manufacturing, Logic, Image classification

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