Roma Luthra
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2020 Presentation + Paper
Padraig Timoney, Roma Luthra, Alex Elia, Haibo Liu, Paul Isbester, Avi Levy, Michael Shifrin, Barak Bringoltz, Ariel Broitman, Eitan Rothstein, Ilya Rubinovich, YongHa Kim, Ofer Shlagman, Barak Ben-Nahum, Marina Zolkin, Igor Turovets, Eylon Rabinovich, Ran Yacoby
Proceedings Volume 11325, 113251H (2020) https://doi.org/10.1117/12.2552058
KEYWORDS: Metrology, Back end of line, Semiconducting wafers, Scatterometry, Machine learning

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