SinFu Yeh
at Zeon Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 21 November 2023 Poster + Paper
Proceedings Volume 12750, 127500U (2023) https://doi.org/10.1117/12.2686602
KEYWORDS: Extreme ultraviolet lithography, Electron beam lithography, Polymers, Lithography, Stochastic processes, Scanners, Printing, High volume manufacturing, Extreme ultraviolet, Polymer thin films

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 1249807 (2023) https://doi.org/10.1117/12.2657506
KEYWORDS: Extreme ultraviolet lithography, Polymers, Lithography, Extreme ultraviolet, Scanners, Photoresist materials, Compact discs, Coating, Etching, Electron beam lithography

Proceedings Article | 25 May 2022 Presentation + Paper
Proceedings Volume 12055, 120550E (2022) https://doi.org/10.1117/12.2613445
KEYWORDS: Extreme ultraviolet lithography, Polymers, Lithography, Extreme ultraviolet, Electron beam lithography, Etching, Photoresist processing, Optical lithography, Photoresist materials, Photomasks

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