Dr. Steven Brems
Principle Member of Technical Staff at imec
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 129530M (2024) https://doi.org/10.1117/12.3010378
KEYWORDS: Pellicles, Extreme ultraviolet lithography, Scanners, Permeability, Extreme ultraviolet, Plasma, Materials properties, Resistance, Hydrogen, Fabrication

Proceedings Article | 30 November 2023 Paper
Chenghan Wu, Steven Brems, Daire Cott, Alexey Milenin, Kevin Vandersmissen, Arantxa Maestre, Alba Centeno, Amaia Zurutuza, Joris Van Campenhout, Dries Van Thourhout, Cedric Huyghebaert, Marianna Pantouvaki, Inge Asselberghs, Didit Yudistira
Proceedings Volume 12794, 1279408 (2023) https://doi.org/10.1117/12.3008414
KEYWORDS: Graphene, Semiconducting wafers, Resistance, Etching, Silicon, Metals, Chemical mechanical planarization, Waveguides, Oxides, Capacitance

SPIE Journal Paper | 27 July 2021
JM3, Vol. 20, Issue 03, 031010, (July 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.3.031010
KEYWORDS: Pellicles, Extreme ultraviolet lithography, Extreme ultraviolet, Raman spectroscopy, Scanners, Carbon, Carbon nanotubes, Plasma, Particles, Coating

SPIE Journal Paper | 8 June 2021
JM3, Vol. 20, Issue 02, 021007, (June 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.2.021007
KEYWORDS: Pellicles, Extreme ultraviolet, Scattering, Extreme ultraviolet lithography, Scanners, Carbon nanotubes, Sensors, Printing, Distance measurement, Scatter measurement

Proceedings Article | 23 March 2021 Presentation + Paper
Proceedings Volume 11609, 116090Y (2021) https://doi.org/10.1117/12.2584519
KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Carbon nanotubes, Scanners, Plasma, Thermography, Photomask technology, Hydrogen, Spectroscopy

Showing 5 of 8 publications
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