Dr. Sven Laux Profile

Dr. Sven Laux

at JENOPTIK Optical Systems GmbH

SPIE Involvement:

Author

Publications (10)

Proceedings Article | 25 September 2008 Paper

Low-loss HR coatings on fused silica substrates for 193 nm micro-lithography applications

Sven Laux, Helmut Bernitzki, Dieter Fasold, Michael Klaus, Uwe Schuhmann

Proceedings Volume 7101, 71010Y (2008) https://doi.org/10.1117/12.797820

KEYWORDS: Optical coatings, Reflectivity, Silica, Absorption, Oxides, Laser applications, Light scattering, Multilayers, Excimer lasers, Metals

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Proceedings Article | 5 October 2005 Paper

Thorium-free interference coatings for infrared applications

Sven Laux, Helmut Bernitzki, Dieter Fasold, Elvira Gittler, Frank Schmidt, Thomas Weyh, Gottfried Wurlitzer

Proceedings Volume 5963, 59631A (2005) https://doi.org/10.1117/12.625146

KEYWORDS: Beam splitters, Infrared radiation, Reflectivity, Antireflective coatings, Infrared coatings, Mirrors, Transmittance, Cements, Prisms, Optical coatings

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Proceedings Article | 25 February 2004 Paper

Ion-assisted deposition processes: industrial network IntIon

Henrik Ehlers, Karl-Josef Becker, Rudolf Beckmann, Nils Beermann, Ulf Brauneck, Peter Fuhrberg, Dieter Gaebler, Stefan Jakobs, Norbert Kaiser, Michael Kennedy, Friedrich Koenig, Sven Laux, Juergen Christian Mueller, Bernd Rau, Werner Riggers, Detlev Ristau, Dieter Schaefer, Olaf Stenzel

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.514817

KEYWORDS: Ions, Plasma, Niobium, Refractive index, Deposition processes, Resolution enhancement technologies, Coating, Prototyping, Oxygen, Absorption

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Proceedings Article | 19 May 2003 Paper

Coated optical components for DUV And VUV laser applications

Sven Laux

Proceedings Volume 10314, 1031410 (2003) https://doi.org/10.1117/12.2284025

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Proceedings Article | 12 April 2001 Paper

Long-time radiation-resistant optical coatings for UV excimer laser applications

Sven Laux, Helmut Bernitzki, Michael Klaus, Hans Lauth, Norbert Kaiser

Proceedings Volume 4347, (2001) https://doi.org/10.1117/12.425034

KEYWORDS: Coating, Ultraviolet radiation, Excimer lasers, Laser induced damage, Refractive index, Optical coatings, Laser damage threshold, Thin films, Plasma, Reflection

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Proceedings Article | 7 September 1999 Paper

Broadband antireflection coatings deposited with ion-assisted evaporation

Sven Laux, Norbert Kaiser, Hansjoerg Niederwald, Michael Mertin, Henrik Ehlers, Detlev Ristau

Proceedings Volume 3738, (1999) https://doi.org/10.1117/12.360066

KEYWORDS: Magnesium fluoride, Coating, Antireflective coatings, Ions, Resistance, Reflectivity, Oxides, Plasma, Absorption, Refractive index

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Proceedings Article | 1 October 1997 Paper

Structure evolution of stratified NdF3 optical thin films

Miklos Adamik, I. Tomov, Ute Kaiser, Sven Laux, Carsten Schmidt, W. Richter, G. Safran, P. Barna

Proceedings Volume 3133, (1997) https://doi.org/10.1117/12.290187

KEYWORDS: Magnesium fluoride, Thin films, Surface roughness, Crystals, Mass attenuation coefficient, X-ray diffraction, Atomic force microscopy, Interfaces, Quartz, Transmission electron microscopy

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Proceedings Article | 19 August 1996 Paper

Structure characteristics of stratified and single fluoride optical coatings

Miklos Adamik, G. Safran, P. Barna, Ute Kaiser, Sven Laux, W. Richter

Proceedings Volume 2776, (1996) https://doi.org/10.1117/12.246836

KEYWORDS: Magnesium fluoride, Mass attenuation coefficient, Thin films, Optical coatings, Crystals, Atomic force microscopy, Transmission electron microscopy, Polishing, Surface finishing, Temperature metrology

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Proceedings Article | 27 May 1996 Paper

UV damage threshold of molecular-beam-deposited fluoride coatings

Sven Laux, Klaus Mann, Ute Kaiser, Bernd Granitza, Oliver Roth, Wolfgang Richter

Proceedings Volume 2714, (1996) https://doi.org/10.1117/12.240373

KEYWORDS: Laser damage threshold, Antireflective coatings, Ultraviolet radiation, Absorption, Fluorine, Molecular beams, Optical coatings, Laser induced damage, Crystals, Model-based design

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Proceedings Article | 4 November 1994 Paper

Molecular beam deposition of fluorides

Sven Laux, Ute Kaiser, Wolfgang Richter

Proceedings Volume 2253, (1994) https://doi.org/10.1117/12.192119

KEYWORDS: Absorption, Magnesium fluoride, Model-based design, Molecular beams, Fluorine, Thin films, Oxygen, Spectroscopy, Optical coatings, Calorimetry

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Showing 5 of 10 publications

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