Dr. Walter Liu Profile

Dr. Walter Liu

at EMD Electronics

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Publications (1)

Proceedings Article | 1 May 2023 Poster + Paper

Positive tone i-line photoresist with controlled undercut profile for advanced packaging

Walter Weihong Liu, Chunwei Chen, Ping-Hung Lu, SookMee Lai, Yoshiharu Sakurai

Proceedings Volume 12498, 124981K (2023) https://doi.org/10.1117/12.2657694

KEYWORDS: Photoresist materials, Copper, Semiconducting wafers, Film thickness, Advanced packaging, Metals, Plating, Baking, Silicon, Photoresist processing

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