Dr. Ye Tian
Applications Engineering @ASML
Area of Expertise:
photolithography , EUV , fiber optics , sensors , overlay , metrology
Publications (20)

Proceedings Article | 28 March 2017 Paper
Yen-Jen Chen, Young Ki Kim, Xueli Hao, Juan-Manuel Gomez, Ye Tian, Ferhad Kamalizadeh, Justin Hanson
Proceedings Volume 10145, 101452K (2017) https://doi.org/10.1117/12.2258125
KEYWORDS: Scanners, Diffraction, Metrology, Semiconducting wafers, Process control, Calibration, Reticles, Overlay metrology, Critical dimension metrology, Lithography

Proceedings Article | 24 March 2016 Paper
Young Ki Kim, Yen-Jen Chen, Xueli Hao, Pavan Samudrala, Juan-Manuel Gomez, Mark Mahoney, Ferhad Kamalizadeh, Justin Hanson, Shawn Lee, Ye Tian
Proceedings Volume 9778, 97780T (2016) https://doi.org/10.1117/12.2213019
KEYWORDS: Error analysis, High volume manufacturing, Semiconducting wafers, Metrology, Process control, Control systems, Scanners, Diffraction, Time metrology, Forward error correction, Lithography, Critical dimension metrology

Proceedings Article | 15 March 2016 Paper
Young Ki Kim, Pavan Samudrala, Juan-Manuel Gomez, Peter Nikolsky, Roy Anunciado, Maria Barkelid, Shawn Lee, Ye Tian, Justin Hanson
Proceedings Volume 9780, 97801Q (2016) https://doi.org/10.1117/12.2214123
KEYWORDS: Semiconducting wafers, Reticles, Critical dimension metrology, Scanners, Photomasks, Metrology, Laser processing, Laser scanners, 3D scanning, Laser metrology

SPIE Journal Paper | 20 June 2013 Open Access
Ye Tian, Nan Wu, Xiaotian Zou, Haitham Felemban, Chengyu Cao, Xingwei Wang
OE, Vol. 52, Issue 06, 065005, (June 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.6.065005
KEYWORDS: Gold, Ultrasonography, Fiber optics, Photoacoustic spectroscopy, Nanolithography, Absorption, Nanostructures, Ion beams, Signal generators, Optical fibers

Proceedings Article | 16 April 2013 Paper
Proceedings Volume 8694, 86940Q (2013) https://doi.org/10.1117/12.2012241
KEYWORDS: Gold, Ultrasonography, Nanocomposites, Fiber optics, Absorption, Photoacoustic spectroscopy, Signal generators, Optical fibers, Pulsed laser operation, Nanoparticles

Showing 5 of 20 publications
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