Yoshiaki Kakimoto
at Kyushu University
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 17 March 2023 Poster + Paper
Proceedings Volume 12408, 124080M (2023) https://doi.org/10.1117/12.2651419
KEYWORDS: Silicon carbide, Laser irradiation, Doping, Resistance, Nitrogen, Excimer lasers, Diffusion, Surface roughness, Fabrication, Silicon

Proceedings Article | 17 March 2023 Poster + Paper
Proceedings Volume 12408, 124080J (2023) https://doi.org/10.1117/12.2648631
KEYWORDS: Laser irradiation, Temperature metrology, Silicon, Pulsed laser operation, Temperature distribution, Laser processing, Laser radiation, Excimer lasers, Cameras, Solids

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