Mr. Yoshiaki Kakimoto Profile

Yoshiaki Kakimoto

at Kyushu University

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Author

Publications (2)

Proceedings Article | 17 March 2023 Poster + Paper

Excimer laser doping for the fabrication of 4H-SiC power devices

Yoshiaki Kakimoto, Keita Katayama, Takuma Yasunami, Tetsuya Goto, Daisuke Nakamura, Hiroshi Ikenoue

Proceedings Volume 12408, 124080M (2023) https://doi.org/10.1117/12.2651419

KEYWORDS: Silicon carbide, Laser irradiation, Doping, Resistance, Nitrogen, Excimer lasers, Diffusion, Surface roughness, Fabrication, Silicon

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Proceedings Article | 17 March 2023 Poster + Paper

Nanosecond time-resolved two-dimensional temperature estimation of nanosecond laser-irradiated silicon

R. Koike, T. Kikuchi, K. Katayama, Y. Kakimoto, D. Nakamura, H. Ikenoue

Proceedings Volume 12408, 124080J (2023) https://doi.org/10.1117/12.2648631

KEYWORDS: Laser irradiation, Temperature metrology, Silicon, Pulsed laser operation, Temperature distribution, Laser processing, Laser radiation, Excimer lasers, Cameras, Solids

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