Dr. Yoshiyuki Kamata
at Toshiba Corp
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 March 2013 Paper
R. Yamamoto, M. Kanamaru, K. Sugawara, N. Sasao, Y. Ootera, T. Okino, H. Hieda, N. Kihara, Y. Kamata, A. Kikitsu
Proceedings Volume 8680, 86801U (2013) https://doi.org/10.1117/12.2012654
KEYWORDS: Beam propagation method, Magnetism, Lithography, Carbon, Nanolithography, Photomasks, Reactive ion etching, Scanning electron microscopy, Servomechanisms, Directed self assembly

Proceedings Article | 21 March 2012 Paper
Takeshi Okino, Takuya Shimada, Akiko Yuzawa, Ryosuke Yamamoto, Naoko Kihara, Yoshiyuki Kamata, Akira Kikitsu, Takashi Akahane, You Yin, Sumio Hosaka
Proceedings Volume 8323, 83230S (2012) https://doi.org/10.1117/12.916304
KEYWORDS: Magnetism, Beam propagation method, Scanning electron microscopy, Image analysis, Servomechanisms, Reactive ion etching, Electron beam lithography, Etching, Oxygen, Directed self assembly

Proceedings Article | 2 April 2011 Paper
Yasuaki Ootera, Akiko Yuzawa, Takuya Shimada, Ryousuke Yamamoto, Yoshiyuki Kamata, Naoko Kihara, Akira Kikitsu
Proceedings Volume 7970, 79700K (2011) https://doi.org/10.1117/12.878936
KEYWORDS: Beam propagation method, Silicon, Etching, Servomechanisms, Nickel, Nanoimprint lithography, Magnetism, Photomasks, Ultraviolet radiation, Electroplating

Proceedings Article | 26 May 2010 Paper
Yoshiyuki Kamata, Akira Kikitsu, Naoko Kihara, Seiji Morita, Kaori Kimura, Haruhiko Izumi
Proceedings Volume 7748, 774809 (2010) https://doi.org/10.1117/12.863873
KEYWORDS: Servomechanisms, Beam propagation method, Magnetism, Head, Photoemission spectroscopy, Etching, Polymers, Scanning electron microscopy, Distortion, Interference (communication)

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