Mr. Youngjin Park Profile

Youngjin Park

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

Computational distortion prediction method considering characteristics of EUV lithography

Jong-hyun Hwang, Jae-il Lee, Hyeon-jun Ha, Jung-hwan Kim, Kwang-sun Song, Young-jin Park

Proceedings Volume 12953, 129530L (2024) https://doi.org/10.1117/12.3010639

KEYWORDS: Extreme ultraviolet, Distortion, Simulations, Overlay metrology, Semiconducting wafers, Deep ultraviolet, Optical lithography, Extreme ultraviolet lithography, Zernike polynomials, Projection systems

Read Abstract +

Proceedings Article | 27 April 2023 Poster + Paper

Absolute alignment measurement of underlayer and overlayer of diffraction-based overlay mark by image-based alignment metrology system

Jaeil Lee, Iksun Park, Youngjin Park, Jonghyun Hwang, Hyeonjun Ha, Jaewoong Sohn, Jaehee Lee, Jinseok Moon, Yuki Kondo, Satoshi Ando

Proceedings Volume 12496, 124962F (2023) https://doi.org/10.1117/12.2657656

KEYWORDS: Overlay metrology, Optical alignment, Metrology

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years