Jaeil Lee
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (5)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 129530L (2024) https://doi.org/10.1117/12.3010639
KEYWORDS: Extreme ultraviolet, Distortion, Simulations, Overlay metrology, Semiconducting wafers, Deep ultraviolet, Optical lithography, Extreme ultraviolet lithography, Zernike polynomials, Projection systems

Proceedings Article | 27 April 2023 Presentation + Paper
Hyosung Lee, Seonho Lee, Hyungju Rah, Iksun Park, Jaeil Lee, Jaewoong Sohn, Yongchan Kim, Christoph Ehrlich, Philip Groeger, Sven Boese, Enrico Bellmann, Stefan Buhl, Seop Kim, Kang-san Lee
Proceedings Volume 12496, 124961P (2023) https://doi.org/10.1117/12.2657679
KEYWORDS: Critical dimension metrology, Semiconducting wafers, Scanning electron microscopy, Image processing, Image restoration, Education and training, Contour extraction, Machine learning, Deformation, Finite element methods

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 124962F (2023) https://doi.org/10.1117/12.2657656
KEYWORDS: Overlay metrology, Optical alignment, Metrology

SPIE Journal Paper | 29 March 2016
Young Seog Kang, Cedric Affentauschegg, Jan Mulkens, Jang-Sun Kim, Ju Hee Shin, Young Ha Kim, YoungSun Nam, Young-Sin Choi, Hunhwan Ha, Dong-Han Lee, Jae-il Lee, Umar Rizvi, Bernd Geh, Rob van der Heijden, Jan Baselmans, Oh-Sung Kwon
JM3, Vol. 15, Issue 02, 021403, (March 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.2.021403
KEYWORDS: Overlay metrology, Metrology, Distortion, Control systems, Semiconducting wafers, Scanners, Etching, Information technology, Image processing, Photomasks

Proceedings Article | 15 March 2016 Paper
Proceedings Volume 9780, 978009 (2016) https://doi.org/10.1117/12.2219922
KEYWORDS: Semiconducting wafers, Overlay metrology, Metrology, Data corrections, Reticles, HVAC controls, Scanners, Time metrology, Data integration, Lithography, Semiconductors, Control systems, Semiconductor manufacturing, Manufacturing, Computer simulations, Content addressable memory

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