Ms. Yuki Ishimaru Profile

Yuki Ishimaru

at SANKEN, Osaka Univ.

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 9 April 2024 Poster + Paper

Tadashi Omatsu, Sachiko Shinjo, Masatoshi Echigo, Yuki Ishimaru, Takahiro Kozawa

Proceedings Volume 12957, 1295723 (2024) https://doi.org/10.1117/12.3012067

KEYWORDS: Extreme ultraviolet lithography, Absorption, Extreme ultraviolet, Photons, Photoresist processing, Electrons, Iodine, Stochastic processes

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Keywords/Phrases