Pareto front optimization for enhanced model prediction accuracy

David S. Fryer; Ignat Moskalenko; Tung-Yu Wu; Meng-Shiun Chiang; Chun Yen Liao; Tsung-Wei Lin; Chun-Sheng Wu; Chao-Yi Huang; Luke Lo; Xiang Fang; Germain Fenger; Farruh Shahidi

doi:10.1117/12.2614118

13 June 2022 Pareto front optimization for enhanced model prediction accuracy

David S. Fryer, Ignat Moskalenko, Tung-Yu Wu, Meng-Shiun Chiang, Chun Yen Liao, Tsung-Wei Lin, Chun-Sheng Wu, Chao-Yi Huang, Luke Lo, Xiang Fang, Germain Fenger, Farruh Shahidi

Author Affiliations +

Proceedings Volume 12052, DTCO and Computational Patterning; 120520Q (2022) https://doi.org/10.1117/12.2614118
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Abstract

A multi-objective optimization flow is developed to identify balanced compact optical proximity correction (OPC) models with ideal calibration accuracy, runtime performance and prediction accuracy. We demonstrate a model selection process based on Pareto front optimization to meet multiple modeling requirements in a single optimization step. A genetic search algorithm determines the final population that offers the best trade-off in set model properties. As a demonstration, we cooptimize calibration accuracy, verification accuracy and term count in a mode developed for hot spot prediction for a line and space memory layer. The optimization determines the minimum number of model terms to meet the off-nominal dose and focus patterning accuracy requirements in verification. Multi-objective optimization provides better verification process window condition (PWC) accuracy because of the multi-objective trade-off built into the genetic algorithm (GA). The optimizer also provides better calibration accuracy (Rms Weighted) than compact models with a fixed configuration because model composition is optimized during GA search. The resulting champion model is 30% more predictive and 5% faster in simulation using this approach. Results for a negative tone develop hole layer with a model complexity of up to 44 terms are also analyzed based on nominal only measurement data. We further show the models selected by multi-objective optimization have a lesser tendency to over-fit the calibration data. The methodology can be applied to streamline complex models for optimum performance and target error rate. In many cases, for smaller data sets, we show that simplified models provide improved verification accuracy within metrology error limits.

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David S. Fryer, Ignat Moskalenko, Tung-Yu Wu, Meng-Shiun Chiang, Chun Yen Liao, Tsung-Wei Lin, Chun-Sheng Wu, Chao-Yi Huang, Luke Lo, Xiang Fang, Germain Fenger, and Farruh Shahidi "Pareto front optimization for enhanced model prediction accuracy", Proc. SPIE 12052, DTCO and Computational Patterning, 120520Q (13 June 2022); https://doi.org/10.1117/12.2614118

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