Dr. Farruh Shahidi
at Siemens EDA
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 June 2022 Presentation + Paper
Proceedings Volume 12052, 120520Q (2022) https://doi.org/10.1117/12.2614118
KEYWORDS: Optimization (mathematics), Calibration, Data modeling, Optical proximity correction, Binary data, Performance modeling, Genetic algorithms, Process modeling, Computer simulations, Precision calibration

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top