Contact patterning strategies for 32nm and 28nm technology

Bradley Morgenfeld; Ian Stobert; Ju j An; Hideki Kanai; Norman Chen; Massud Aminpur; Colin Brodsky; Alan Thomas

doi:10.1117/12.879773

22 March 2011 Contact patterning strategies for 32nm and 28nm technology

Bradley Morgenfeld, Ian Stobert, Ju j An, Hideki Kanai, Norman Chen, Massud Aminpur, Colin Brodsky, Alan Thomas

Proceedings Volume 7973, Optical Microlithography XXIV; 797319 (2011) https://doi.org/10.1117/12.879773
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

As 193 nm immersion lithography is extended indefinitely to sustain technology roadmaps, there is increasing pressure to contain escalating lithography costs by identifying patterning solutions that can minimize the use of multiple-pass processes. Contact patterning for the 32/28 nm technology nodes has been greatly facilitated by just-in-time introduction of new process enablers that allow the simultaneous support of flexible foundry-oriented ground rules alongside highperformance technology, while also migrating to a single-pass patterning process. The incorporation of device based performance metrics along with rigorous patterning and structural variability studies were critical in the evaluation of material innovation for improved resolution and CD shrink along with novel data preparation flows utilizing aggressive strategies for SRAF insertion and retargeting.

Citation Download Citation

Bradley Morgenfeld, Ian Stobert, Ju j An, Hideki Kanai, Norman Chen, Massud Aminpur, Colin Brodsky, and Alan Thomas "Contact patterning strategies for 32nm and 28nm technology", Proc. SPIE 7973, Optical Microlithography XXIV, 797319 (22 March 2011); https://doi.org/10.1117/12.879773

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available