Dr. Donna M. Lennon
at MIT Lincoln Lab
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | February 18, 2009
Proc. SPIE. 7220, Silicon Photonics IV
KEYWORDS: Optical filters, Electronics, Femtosecond phenomena, Waveguides, Mode locking, Germanium, Silicon, Photodiodes, Modulators, Diodes

PROCEEDINGS ARTICLE | February 13, 2008
Proc. SPIE. 6898, Silicon Photonics III
KEYWORDS: Photodetectors, Optical filters, Electronics, Waveguides, Germanium, Silicon, Photodiodes, Modulators, Diodes, Phase shifts

PROCEEDINGS ARTICLE | March 23, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Wafer-level optics, Lithography, Electron beam lithography, Polymethylmethacrylate, Photoresist materials, Head-mounted displays, Photoresist processing, Semiconducting wafers, Hybrid optics, Chemically amplified resists

PROCEEDINGS ARTICLE | February 14, 2007
Proc. SPIE. 6477, Silicon Photonics II
KEYWORDS: Optical filters, Electronics, Femtosecond phenomena, Modulation, Resonators, Waveguides, Silicon, Photodiodes, Modulators, Diodes

PROCEEDINGS ARTICLE | July 24, 2002
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Silicon, Diffusion, 3D modeling, Optical simulations, Optical proximity correction, Mask making, Semiconducting wafers

PROCEEDINGS ARTICLE | December 30, 1999
Proc. SPIE. 3873, 19th Annual Symposium on Photomask Technology
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Statistical analysis, Monte Carlo methods, Photomasks, Optical simulations, Mask making, Photoresist processing, Performance modeling

Showing 5 of 7 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top