Dr. Li-Jin Chen Profile

Dr. Li-Jin Chen

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Publications (14)

Proceedings Article | 10 April 2024 Poster + Paper

Advanced regression OPC model setup

Tony Hu, Weilun Chiu, Terry Hsuan, Elvis Yang, Li-Jin Chen, Tony Chao, Y. Liao, Elsley Tan

Proceedings Volume 12954, 1295419 (2024) https://doi.org/10.1117/12.3008958

KEYWORDS: Autoregressive models, Optical proximity correction, Performance modeling, Education and training, 3D modeling, Calibration, Neurons, Data modeling, Modeling, Overfitting

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Proceedings Article | 13 June 2022 Presentation

Feasibility study of machine learning modeling for full chip optical proximity correction

Yuping Cui, Jing Xue, Jing Sha, Zheng Guo Chen, Larry Zhuang, Derren Dunn, Jeffrery Shearer, Li-Jin Chen, Rich Wu, Charlie King

Proceedings Volume 12052, 120520R (2022) https://doi.org/10.1117/12.2614060

KEYWORDS: Optical proximity correction, Machine learning, Data modeling, Neural networks, Process modeling, Photomasks, Wafer-level optics, Semiconducting wafers, Lithography, Photoresist processing

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Proceedings Article | 13 April 2021 Presentation + Paper

Using machine learning etch models in OPC and ILT correction

Kevin Hooker, Lena Zavyalova, Shuo Huang, Li-Jin Chen

Proceedings Volume 11614, 116140B (2021) https://doi.org/10.1117/12.2587225

KEYWORDS: Etching, Optical proximity correction, Machine learning, Photomasks, Model-based design, Semiconductors, Neural networks, Extreme ultraviolet lithography, Deep ultraviolet

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Proceedings Article | 22 February 2021 Presentation

Validation of machine learning OPC compact models for advanced manufacturing

Moongyu Jeong, Marco Guajardo, Cheng-En Wu, Song-haeng Lee, Tim Fuehner, Lena Zavyalova, Li-Jin Chen, Hua Song, Kevin Lucas

Proceedings Volume 11614, 116140R (2021) https://doi.org/10.1117/12.2584940

KEYWORDS: Optical proximity correction, Machine learning, Data modeling, Manufacturing, Critical dimension metrology, Semiconductors, Photomasks, Semiconducting wafers, Optical lithography, Neural networks

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Proceedings Article | 24 September 2012 Paper

High-resolution Fourier transform spectrograph for characterization of echelle spectrograph wavelength calibrators

Alexander Glenday, David Phillips, Matthew Webber, Chih-Hao Li, Gabor Furesz, Guoqing Chang, Li-Jin Chen, Franz Kärtner, Dimitar Sasselov, Andrew Szentgyorgyi, Ronald Walsworth

Proceedings Volume 8446, 844696 (2012) https://doi.org/10.1117/12.926366

KEYWORDS: Fourier transforms, Calibration, Spectrographs, Signal to noise ratio, Interferometers, Fabry–Perot interferometers, Lamps, Collimation, Mirrors, Thorium

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Proceedings Article | 24 September 2012 Paper

Calibration of an echelle spectrograph with an astro-comb: a laser frequency comb with very high repetition rate

David Phillips, Alex Glenday, Chih-Hao Li, Gabor Furesz, Andrew Benedick, Guoqing Chang, Li-Jin Chen, Sylvain Korzennik, Dimitar Sasselov, Franz Kaertner, Andrew Szentgyorgyi, Ronald Walsworth

Proceedings Volume 8446, 84468O (2012) https://doi.org/10.1117/12.926465

KEYWORDS: Spectrographs, Calibration, Spectral calibration, Frequency combs, Semiconductor lasers, Phase modulation, Light, Charge-coupled devices, Laser stabilization, Planets

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Proceedings Article | 24 September 2012 Paper

Green astro-comb for HARPS-N

Chih-Hao Li, Alexander Glenday, David Phillips, Gabor Furesz, Nicholas Langellier, Matthew Webber, Alexander Zibrov, Andrew Benedick, Guoqing Chang, Li-Jin Chen, Dimitar Sasselov, Franz Kärtner, Andrew Szentgyorgyi, Ronald Walsworth

Proceedings Volume 8446, 84468X (2012) https://doi.org/10.1117/12.925799

KEYWORDS: Spectrographs, Calibration, Exoplanets, Optical filters, Continuous wave operation, Linear filtering, Mirrors, Fourier transforms, Stars, Photonic crystal fibers

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Proceedings Article | 21 February 2011 Paper

Fiber-optic Cherenkov radiation excited by few-cycle pulses

Guoqing Chang, Li-Jin Chen, Franz Kärtner

Proceedings Volume 7937, 79371M (2011) https://doi.org/10.1117/12.877068

KEYWORDS: Solitons, Chromium, Fiber optics, Raman spectroscopy, Wave propagation, Visible radiation, Dispersion, Cerenkov radiation imaging, Energy efficiency, Scanning probe microscopy

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Proceedings Article | 20 July 2010 Paper

Astro-comb calibration of an Echelle Spectrograph

C.-H. Li, D. Phillips, A. Glenday, A. Benedick, G. Chang, L.-J. Chen, C. Cramer, G. Furesz, F. Kärtner, D. Sasselov, A. Szentgyorgyi, R. Walsworth

Proceedings Volume 7735, 77354O (2010) https://doi.org/10.1117/12.857534

KEYWORDS: Calibration, Spectrographs, Charge-coupled devices, Semiconductor lasers, Near infrared, Spectral calibration, Signal to noise ratio, Exoplanets, Telescopes, Femtosecond phenomena

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Proceedings Article | 18 February 2009 Paper

High speed analog-to-digital conversion with silicon photonics

C. Holzwarth, R. Amatya, M. Araghchini, J. Birge, H. Byun, J. Chen, M. Dahlem, N. DiLello, F. Gan, J. Hoyt, E. Ippen, F. Kärtner, A. Khilo, J. Kim, M. Kim, A. Motamedi, J. Orcutt, M. Park, M. Perrott, M. Popovic, R. Ram, H. Smith, G. Zhou, S. Spector, T. Lyszczarz, M. Geis, D. Lennon, J. Yoon, M. Grein, R. Schulein, S. Frolov, A. Hanjani, J. Shmulovich

Proceedings Volume 7220, 72200B (2009) https://doi.org/10.1117/12.808952

KEYWORDS: Silicon, Waveguides, Modulators, Diodes, Electronics, Germanium, Photodiodes, Femtosecond phenomena, Optical filters, Mode locking

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Proceedings Article | 1 February 2007 Paper

Sub-wavelength THz plastic fibers

Ja-Yu Lu, Hung-Wen Chen, Li-Jin Chen, Chi-Kuang Sun

Proceedings Volume 6472, 647208 (2007) https://doi.org/10.1117/12.705499

KEYWORDS: Terahertz radiation, Signal attenuation, Optical fibers, Waveguides, Directional couplers, Metals, Fiber couplers, Mirrors, Radio propagation, Absorption

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Proceedings Article | 12 October 2006 Paper

Subwavelength plastic fiber for terahertz wave guiding

Chi-Kuang Sun, Li-Jin Chen, Hung-Wen Chen, Ja-Yu Lu

Proceedings Volume 6373, 63730F (2006) https://doi.org/10.1117/12.687350

KEYWORDS: Terahertz radiation, Signal attenuation, Waveguides, Metals, Absorption, Mirrors, Radio propagation, Solids, Dielectrics, Refractive index

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Proceedings Article | 25 October 2005 Paper

Terahertz biochip based on optoelectronic devices

Ja-Yu Lu, Li-Jin Chen, Tzeng-Fu Kao, Hsu-Hao Chang, An-Shyi Liu, Yi-Chun Yu, Ruey-Beei Wu, Wei-Sheng Liu, Jen-Inn Chyi, Ci-Ling Pan, Ming-Cheng Tsai, Chi-Kuang Sun

Proceedings Volume 6013, 60130I (2005) https://doi.org/10.1117/12.630033

KEYWORDS: Terahertz radiation, Photonics, Transmitters, Molecules, Biosensing, Spectroscopy, Near field optics, Absorption, Sun, Luminescence

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Proceedings Article | 23 March 2005 Paper

Two-photon fluorescence microscope with a hollow-core photonic crystal fiber

Shih-Peng Tai, Ming-Che Chan, Tsung-Han Tsai, Shi-Hao Guol, Li-Jin Chen, Chi-Kuang Sun

Proceedings Volume 5691, (2005) https://doi.org/10.1117/12.588474

KEYWORDS: Dispersion, Luminescence, Scanning probe microscopy, Photonic crystal fibers, Single mode fibers, Femtosecond phenomena, Microscopes, Two photon excitation microscopy, Medical research, Modulation

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Showing 5 of 14 publications

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