Dr. Li-Jin Chen
SPIE Involvement:
Publications (14)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12954, 1295419 (2024) https://doi.org/10.1117/12.3008958
KEYWORDS: Autoregressive models, Optical proximity correction, Performance modeling, Education and training, 3D modeling, Calibration, Neurons, Data modeling, Modeling, Overfitting

Proceedings Article | 13 June 2022 Presentation
Yuping Cui, Jing Xue, Jing Sha, Zheng Guo Chen, Larry Zhuang, Derren Dunn, Jeffrery Shearer, Li-Jin Chen, Rich Wu, Charlie King
Proceedings Volume 12052, 120520R (2022) https://doi.org/10.1117/12.2614060
KEYWORDS: Optical proximity correction, Machine learning, Data modeling, Neural networks, Process modeling, Photomasks, Wafer-level optics, Semiconducting wafers, Lithography, Photoresist processing

Proceedings Article | 13 April 2021 Presentation + Paper
Proceedings Volume 11614, 116140B (2021) https://doi.org/10.1117/12.2587225
KEYWORDS: Etching, Optical proximity correction, Machine learning, Photomasks, Model-based design, Semiconductors, Neural networks, Extreme ultraviolet lithography, Deep ultraviolet

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11614, 116140R (2021) https://doi.org/10.1117/12.2584940
KEYWORDS: Optical proximity correction, Machine learning, Data modeling, Manufacturing, Critical dimension metrology, Semiconductors, Photomasks, Semiconducting wafers, Optical lithography, Neural networks

Proceedings Article | 24 September 2012 Paper
Alexander Glenday, David Phillips, Matthew Webber, Chih-Hao Li, Gabor Furesz, Guoqing Chang, Li-Jin Chen, Franz Kärtner, Dimitar Sasselov, Andrew Szentgyorgyi, Ronald Walsworth
Proceedings Volume 8446, 844696 (2012) https://doi.org/10.1117/12.926366
KEYWORDS: Fourier transforms, Calibration, Spectrographs, Signal to noise ratio, Interferometers, Fabry–Perot interferometers, Lamps, Collimation, Mirrors, Thorium

Showing 5 of 14 publications
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