Mr. Gaurav Nanda
at
SPIE Involvement:
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Publications (1)

PROCEEDINGS ARTICLE | June 26, 2017
Proc. SPIE. 10329, Optical Measurement Systems for Industrial Inspection X
KEYWORDS: Wafer-level optics, Reticles, Metrology, Optical spheres, Defect detection, Speckle, Scanners, Particles, Silicon, Optical microscopy, Manufacturing, Inspection, Atomic force microscopy, Scanning electron microscopy, Latex, Semiconducting wafers, Signal detection, Particle contamination, Contamination control, Defect inspection

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