Dr. Hans W.P. Koops
CEO at HaWilKo GmbH
SPIE Involvement:
Publications (14)

Proceedings Article | 28 June 2005 Paper
Proceedings Volume 5838, (2005) https://doi.org/10.1117/12.627564
KEYWORDS: Ions, Titanium, Particles, Microelectromechanical systems, Ionization, Metals, Electron beams, Thin film coatings, Free electron lasers, Resistance

Proceedings Article | 17 December 2003 Paper
Ottmar Hoinkis, Volker Boegli, Bernd Weyrauch, Klaus Edinger, Susanne Göhde, Alexander Kaya, Thorsten Hofmann, Johannes Bihr, Rainer Becker, Michael Budach, Volker Bert, Petra Spies, Jochen Guyot, Hans Koops, Hans Becht
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.532866
KEYWORDS: Photomasks, Etching, Electron beams, Quartz, Silicon carbide, Scanning electron microscopy, Image processing, Chromium, Ion beams, Molecules

Proceedings Article | 28 August 2003 Paper
Hans Koops, Klaus Edinger, Ottmar Hoinkis, Jens Greiser, Michael Budach, Bernd Weyrauch, Johannes Bihr, Volker Boegli
Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504061
KEYWORDS: Photomasks, Etching, Electron beams, Ion beams, Lithography, Silicon carbide, Gemini Observatory, Magnetism, Signal attenuation, Electron beam lithography

Proceedings Article | 28 May 2003 Paper
Klaus Edinger, Johannes Bihr, Volker Boegli, Jens Greiser, Hans Koops
Proceedings Volume 5148, (2003) https://doi.org/10.1117/12.514972
KEYWORDS: Photomasks, Electron beams, Etching, Platinum, Interferometers, Charged-particle lithography, Quartz, Silicon carbide, Scanning electron microscopy, Control systems

Proceedings Article | 24 April 2003 Paper
Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.500603
KEYWORDS: Nanolithography, Electron beams, Etching, Photonic crystals, Rapid manufacturing, Metals, Ions, Computing systems, Control systems, Molecules

Showing 5 of 14 publications
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