Dr. Sergey Babin
President at Abeam Technologies Inc
SPIE Involvement:
Publications (77)

Proceedings Article | 21 August 2020 Paper
Proceedings Volume 11490, 114900W (2020) https://doi.org/10.1117/12.2568309
KEYWORDS: Modulation transfer functions, Fizeau interferometers, Calibration, Light sources, Interferometers, Spatial frequencies, Metrology, Zoom lenses, Binary data

Proceedings Article | 25 March 2019 Paper
Roberto Fallica, Seyed Javid Rezvani, Stefano Nannarone, Sergei Borisov, Danilo De Simone, Sergey Babin, Gian Lorusso, Geert Vandenberghe
Proceedings Volume 10960, 1096009 (2019) https://doi.org/10.1117/12.2514998
KEYWORDS: Electrons, Photoresist materials, Extreme ultraviolet lithography, Polymers, Scattering, Extreme ultraviolet, Sensors, Spectroscopy, Data modeling, Lithography

Proceedings Article | 18 August 2018 Paper
Valeriy Yashchuk, Sergey Babin, Stefano Cabrini, Ulf Griesmann, Ian Lacey, Keiko Munechika, Carlos Pina-Hernandez, Quandou Wang
Proceedings Volume 10749, 107490R (2018) https://doi.org/10.1117/12.2322011
KEYWORDS: Interferometers, Fizeau interferometers, Spatial frequencies, Modulation transfer functions, Visualization, Monochromatic aberrations

Proceedings Article | 28 March 2018 Paper
S. Babin, S. Borisov, I. Ivonin, S. Nakazawa, Y. Yamazaki
Proceedings Volume 10585, 105852B (2018) https://doi.org/10.1117/12.2299847
KEYWORDS: Scanning electron microscopy, Signal to noise ratio, Image quality, Imaging systems, Optical resolution, Semiconducting wafers, Interference (communication), Image display

Proceedings Article | 19 March 2018 Presentation
Proceedings Volume 10585, 105850K (2018) https://doi.org/10.1117/12.2298389
KEYWORDS: Cadmium sulfide, Scanning electron microscopy, Etching, Transmission electron microscopy, Metrology, Semiconductor manufacturing, Critical dimension metrology, Image processing, Software development

Showing 5 of 77 publications
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