Hideo Hoshino
at EUVA
SPIE Involvement:
Author
Publications (17)

PROCEEDINGS ARTICLE | March 18, 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Ions, Laser development, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Laser systems engineering, Tin

PROCEEDINGS ARTICLE | March 21, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Light sources, Optical amplifiers, Oscillators, Carbon dioxide, Carbon dioxide lasers, Laser stabilization, Extreme ultraviolet, Pulsed laser operation, Laser systems engineering, Tin

PROCEEDINGS ARTICLE | March 20, 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Mirrors, Light sources, Carbon dioxide, Ions, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Pulsed laser operation, Plasma, Tin

PROCEEDINGS ARTICLE | September 13, 2007
Proc. SPIE. 6703, Ultrafast X-Ray Sources and Detectors
KEYWORDS: Light sources, Ions, Carbon dioxide lasers, Magnetism, Gas lasers, Extreme ultraviolet, Carbon monoxide, Pulsed laser operation, Plasma, Tin

PROCEEDINGS ARTICLE | March 21, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Mirrors, Glasses, Ions, Nd:YAG lasers, Solids, Gas lasers, Extreme ultraviolet, Carbon monoxide, Plasma, Tin

PROCEEDINGS ARTICLE | March 19, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Light sources, Optical amplifiers, Ions, Nd:YAG lasers, Gas lasers, Extreme ultraviolet, Carbon monoxide, Pulsed laser operation, Plasma, Tin

Showing 5 of 17 publications
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