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Kai-Bang Hsu
at Macronix International Co Ltd
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Publications (1)
Proceedings Article | 27 April 2023 Poster + Paper
Investigation of device overlay variation and control metrology in 3D-NAND process
Yu-Lin Liu, Li-Ting Chang, Kai-Bang Hsu, Mars Yang, Elvis Yang, T. Yang, K. Chen
Proceedings Volume 12496, 1249628 (2023) https://doi.org/10.1117/12.2657015
KEYWORDS: Overlay metrology, Semiconducting wafers, Single crystal X-ray diffraction, Metrology, Etching, Reflection, Coating stress, Process control, Control systems, Modeling
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