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Koichiro Komatsu
at Nikon Corp
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 2 June 2000 Paper
Automatic macro inspection system
Toshiaki Kitamura, Yasuharu Nakajima, Hiroyuki Matsumoto, Takeo Omori, Koichiro Komatsu
Proceedings Volume 3998, (2000) https://doi.org/10.1117/12.386514
KEYWORDS: Semiconducting wafers, Inspection, Diffraction, Image processing, Imaging systems, Defect detection, Wafer-level optics, Defect inspection, Wafer inspection, Photoresist processing
Proceedings Article | 14 June 1999 Paper
Automatic macroinspection system
Koichiro Komatsu, Takeo Omori, Toshiaki Kitamura, Yasuharu Nakajima, Arun Aiyer, Kyoichi Suwa
Proceedings Volume 3677, (1999) https://doi.org/10.1117/12.350863
KEYWORDS: Semiconducting wafers, Inspection, Light scattering, Wafer-level optics, Fourier transforms, Defect detection, Wafer inspection, Particles, CCD cameras, Cameras
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