Dr. Lennon Yao Ting Lee Profile

Dr. Lennon Yao Ting Lee

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Author

Publications (13)

Proceedings Article | 15 March 2024 Presentation + Paper

Material characterization of silicon dioxide cladding for photonic devices

Amy S. Tong, Doris K. Ng, Roshan Kanhirakkottil, Jia Sheng Goh, Jiamu Jin, Andrew W. Fong, Steven H. Lee, Hong Cai, Lennon Y. Lee

Proceedings Volume 12887, 128870E (2024) https://doi.org/10.1117/12.3001995

KEYWORDS: Refractive index, Cladding, Plasma enhanced chemical vapor deposition, Coating stress, Silica, Low pressure chemical vapor deposition, Surface roughness, Waveguides, Semiconducting wafers, Photonic devices

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Proceedings Article | 13 March 2024 Presentation + Paper

Low-loss 800nm-thick PECVD silicon nitride photonic platform on 300-mm wafer

Hong Cai, Bo Li, Yiding Lin, Haitao Yu, Steven Hou Jang Lee, Chin Khang Tew, Jae Ok Yoo, Charmaine Goh, Shervonne Woon, Doris Keh Ting Ng, Navab Singh, Xianshu Luo, Lennon Yao Ting Lee

Proceedings Volume 12898, 1289802 (2024) https://doi.org/10.1117/12.3002146

KEYWORDS: Silicon nitride, Waveguides, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Silicon photonics, Film thickness, Fabrication, Chemical mechanical planarization, Photonic integrated circuits

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Proceedings Article | 12 March 2024 Presentation + Paper

High aspect ratio Ge-on-Si waveguide platform for miniaturized mid-infrared applications

Andrew Whye Keong Fong, Rachel Chen Fang Ang, Leh Woon Lim, Lennon Yao Ting Lee, Qingxin Zhang, Doris Keh Ting Ng, Xianshu Luo, Landobasa Y. Tobing

Proceedings Volume 12889, 128890I (2024) https://doi.org/10.1117/12.3000110

KEYWORDS: Waveguides, Silicon, Wave propagation, Germanium, Design, Miniaturization, Photonics, Mid infrared, Integrated optics

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Proceedings Article | 12 March 2024 Presentation + Paper

Scandium-doped aluminum nitride photonic integration platform

Nanxi Li, Wing Wai Chung, Jia Sheng Goh, Yat Fung Tsang, Landobasa Y. Tobing, Chong Pei Ho, Binni Varghese, Leh Woon Lim, Minghua Li, Huamao Lin, Qingxin Zhang, Doris K. Ng, Lennon Y. Lee, Xianshu Luo

Proceedings Volume 12889, 128890D (2024) https://doi.org/10.1117/12.3004598

KEYWORDS: Waveguides, Aluminum nitride, Microrings, Photonic integrated circuits, Microresonators, Scandium, Harmonic generation, Optical properties, Semiconducting wafers, Resonators

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Proceedings Article | 17 March 2023 Poster + Paper

Reduction of Ge-on-Si waveguide propagation loss by laser and hydrogen annealing

Leh Woon Lim, Andrew Whye Keong Fong, Rachel Chen Fang Ang, Roth Qin Gui Voo, Justin Nian Hong Teh, Md Hazwani Khairy Md Husni, Hong Cai, Landobasa Y. Tobing, Nanxi Li, Surasit Chung, Lennon Yao Ting Lee

Proceedings Volume 12424, 1242414 (2023) https://doi.org/10.1117/12.2649846

KEYWORDS: Annealing, Waveguides, Wave propagation, Hydrogen, Germanium, Silicon, Quantum cascade lasers, Mid-IR, Crystals

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Proceedings Article | 15 March 2023 Presentation + Paper

Low-power contactless button system based on MEMS ScAlN pyroelectric detector

Linfang Xu, Doris K. Ng, Weiguo Chen, Nanxi Li, Chong Pei Ho, Duan Jian Goh, Yao Zhang, Qingxin Zhang, Lennon Y. Lee

Proceedings Volume 12434, 1243405 (2023) https://doi.org/10.1117/12.2648806

KEYWORDS: Pyroelectricity, Pyroelectric detectors, Signal detection, Power consumption, Thermography, Microelectromechanical systems, Infrared imaging, Infrared sensors, Infrared detectors

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Proceedings Article | 15 March 2023 Poster + Paper

An integrated MEMS thermal emitter with piezoelectric actuation

Nanxi Li, Andrew Whye Keong Fong, Huanhuan Wang, Leh Woon Lim, Landobasa Y. Tobing, Yun Da Chua, Linfang Xu, Weiguo Chen, Qingxin Zhang, Hong Cai, Qi Jie Wang, Lennon Yao Ting Lee

Proceedings Volume 12434, 124340T (2023) https://doi.org/10.1117/12.2649536

KEYWORDS: Microelectromechanical systems, Silicon, Fabrication, Aluminum nitride, Molybdenum, Emission spectrum, Silicon nitride, Emission wavelengths, Electrodes, Biological and chemical sensing

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Proceedings Article | 15 March 2023 Presentation + Paper

Model-based optical proximity correction for immersion lithography-based flat optics platform

Narak Choi, Keng Heng Lai, Arvind Sundaram, Navab Singh, Yuan Hsing Fu, Lennon Y. T. Lee

Proceedings Volume 12432, 1243205 (2023) https://doi.org/10.1117/12.2647686

KEYWORDS: Optical proximity correction, Flat optics, Critical dimension metrology, Optical lithography, Manufacturing, Lithography, Design and modelling

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Proceedings Article | 13 March 2023 Presentation + Paper

On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detector

Hong Cai, Md Hazwani Khairy, Rachel Chen Fang Ang, Linfang Xu, Doris Keh Ting Ng, Nanxi Li, Zhonghua Gu, Anmin Kong, Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching, Norhanani Jaafar, Huanhuan Wang, Landobasa Y. Tobing, Leh Woon Lim, Qingxin Zhang, Lennon Yao Ting Lee

Proceedings Volume 12426, 124260H (2023) https://doi.org/10.1117/12.2650363

KEYWORDS: Sensors, Pyroelectric detectors, Microelectromechanical systems, Gas sensors, Carbon dioxide, Pyroelectricity, CMOS sensors, Temperature metrology, Environmental monitoring

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SPIE Journal Paper | 8 June 2022 Open Access

Advances in lithium niobate photonics: development status and perspectives

Guanyu Chen, Nanxi Li, Jun Da Ng, Hong-Lin Lin, Yanyan Zhou, Yuan Hsing Fu, Lennon Y. Lee, Yu Yu, Ai-Qun Liu, Aaron Danner

AP, Vol. 4, Issue 03, 034003, (June 2022) https://doi.org/10.1117/12.10.1117/1.AP.4.3.034003

KEYWORDS: Photonics, Modulators, Waveguides, Crystals, Argon, Etching, Lithium niobate, Refractive index, Second-harmonic generation, Acousto-optics

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Proceedings Article | 5 March 2021 Presentation + Paper

Photonic crystal MEMS emitter for chemical gas sensing

Nanxi Li, Qin Chao, Zhonghua Gu, Shiwei Song, Yanyan Zhou, Shaonan Zheng, Linfang Xu, Yun Da Chua, Qingxin Zhang, Hong Cai, Daohua Zhang, Qi Jie Wang, Lennon Lee

Proceedings Volume 11697, 116970M (2021) https://doi.org/10.1117/12.2581358

KEYWORDS: Photonic crystals, Industrial chemicals, Biological and chemical sensing, Microelectromechanical systems, Mid-IR, Thermal sensing, Silicon, Sensing systems, Optical sensors, Process control

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Proceedings Article | 5 March 2021 Presentation + Paper

CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlN

Doris K. Ng, Chong-Pei Ho, Tantan Zhang, Linfang Xu, Li-Yan Siow, Wing-Wai Chung, Hong Cai, Lennon Y. Lee, Qingxin Zhang, Navab Singh

Proceedings Volume 11697, 116970N (2021) https://doi.org/10.1117/12.2582707

KEYWORDS: Infrared sensors, Infrared radiation, Absorption, Thin films, Sensors, Pyroelectric detectors, Infrared detectors, Aluminum nitride, Microelectromechanical systems, Thermography

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Proceedings Article | 5 March 2021 Presentation + Paper

Miniaturized gas sensor based on silicon substrate-integrated hollow waveguides

Shaonan Zheng, Hong Cai, Linfang Xu, Nanxi Li, Jinjing Fu, Zhonghua Gu, Yao Zhang, Weiguo Chen, Yuxi Cui, Fuu Ming Kai, Lennon Yao Ting Lee

Proceedings Volume 11689, 116890C (2021) https://doi.org/10.1117/12.2581814

KEYWORDS: Gas sensors, Silicon, Hollow waveguides, Semiconducting wafers, Sensors, Infrared technology, Deep reactive ion etching, Carbon dioxide, Wet etching, Waveguides

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Showing 5 of 13 publications

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