Mr. Masanori Yashiro
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Light sources, Deep ultraviolet, Molecules, Xenon, Laser stabilization, Gas lasers, Excimer lasers, Semiconductor manufacturing, Neon, Pulsed laser operation, Prototyping, Beam controllers, Sustainable technology, Laser systems engineering

PROCEEDINGS ARTICLE | March 13, 2012
Proc. SPIE. 8326, Optical Microlithography XXV
KEYWORDS: Optical lithography, Manufacturing, Laser development, Laser drilling, Control systems, Gas lasers, Excimer lasers, Semiconducting wafers, Gemini Planet Imager, 193nm lithography

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