Ovadia Ilgayev
Application Team Leader at Nova Measuring Instruments Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Thin films, Metrology, Diffractive optical elements, Etching, Chemical species, Dielectrics, Transmission electron microscopy, Scatterometry, Solids, 3D metrology, Process control, Photomasks, Semiconducting wafers, Thin film devices, Channel projecting optics

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