Dr. Wei-Shan Wang
at Fraunhofer ENAS
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | April 26, 2016
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Microelectromechanical systems, Gold, Beam splitters, Mirau interferometers, Interferometers, Optical coherence tomography, Glasses, Scanners, Microopto electromechanical systems, Microlens, Laser cutting, Semiconducting wafers, Wafer bonding

PROCEEDINGS ARTICLE | April 26, 2016
Proc. SPIE. 9890, Optical Micro- and Nanometrology VI
KEYWORDS: Mirrors, Beam splitters, Microsystems, Optical coherence tomography, Skin, Silicon, Microopto electromechanical systems, Semiconducting wafers

PROCEEDINGS ARTICLE | February 27, 2015
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Wafer-level optics, Confocal microscopy, Microscopes, Beam splitters, Etching, Glasses, Silicon, Microopto electromechanical systems, Microlens, Semiconducting wafers

PROCEEDINGS ARTICLE | February 27, 2015
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Wafer-level optics, Mirau interferometers, Optical coherence tomography, Glasses, Interfaces, Silicon, Microopto electromechanical systems, Microlens, Semiconducting wafers, Wafer bonding

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