Dr. Xavier Colonna de Lega
Sr Research Scientist at Zygo Corporation
SPIE Involvement:
Author
Publications (19)

PROCEEDINGS ARTICLE | August 18, 2014
Proc. SPIE. 9203, Interferometry XVII: Techniques and Analysis
KEYWORDS: Microscopes, Optical filters, Light sources, Metrology, Cameras, Sensors, Image resolution, Interferometry, Data acquisition, Color imaging

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Oxides, Microscopes, Metrology, Data modeling, Polarization, Optical properties, Data storage, Reflectivity, 3D metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | August 11, 2008
Proc. SPIE. 7064, Interferometry XIV: Applications
KEYWORDS: Thin films, Multilayers, Optical properties, Interferometers, Microscopy, Silicon, Interferometry, 3D modeling, Profiling, 3D metrology

PROCEEDINGS ARTICLE | April 25, 2008
Proc. SPIE. 6995, Optical Micro- and Nanometrology in Microsystems Technology II
KEYWORDS: Oxides, Microscopes, Refractive index, Data modeling, Silica, Polarization, Optical properties, Silicon, Interferometry, Objectives

PROCEEDINGS ARTICLE | September 10, 2004
Proc. SPIE. 5457, Optical Metrology in Production Engineering
KEYWORDS: Superposition, Thin films, Microscopes, Light sources, Ferroelectric materials, Spatial frequencies, Cameras, Fourier transforms, Interferometry, Optical interferometry

PROCEEDINGS ARTICLE | August 16, 2004
Proc. SPIE. 5455, MEMS, MOEMS, and Micromachining
KEYWORDS: Microelectromechanical systems, Thin films, Microscopes, Ferroelectric materials, Metrology, Defect detection, Microscopy, Optical microscopy, Interferometry, Microopto electromechanical systems

Showing 5 of 19 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top