Mr. Youngsu Sung Profile

Youngsu Sung

at SAMSUNG Electronics Co Ltd

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Author

Publications (3)

Proceedings Article | 26 August 2024 Paper

Improvement of mask pattern placement error using novel resist charging control methodology in multi-beam mask writer

Hyoyeon Kim, Hyungrae Noh, Wonsik Shin, Kangho Park, Youngjae Lee, Sangho Jo, Youngsu Sung, Hojune Lee, Heebom Kim, Jin Choi, Sanghee Lee, Alexander Egl, Gottfried Hochleitner, Matthias Kühmayer, Matthias Liertzer, Francesco Massa, Mathias Tomandl

Proceedings Volume 13177, 131770V (2024) https://doi.org/10.1117/12.3032199

KEYWORDS: Error analysis, Semiconducting wafers, Calibration, Logic, Overlay metrology, Logic devices, Simulations, Palladium, Optical alignment, Image registration, Photomasks

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Proceedings Article | 10 April 2024 Presentation

MBMW's comprehensive requirements and roles for next EUV era and its mass production

Inhwan Noh, Jongmun Park, Heebom Kim, Jin Choi, Sang-Hee Lee, Hojune Lee, Byung-Sup Ahn, Youngsu Sung

Proceedings Volume PC12956, PC1295605 (2024) https://doi.org/10.1117/12.3009572

KEYWORDS: Extreme ultraviolet, Logic

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Proceedings Article | 21 November 2023 Presentation + Paper

Novel method for precise curved EUV mask CD characterization by adopting machine learning

Jaeseo Lee, Inhwan Noh, Youngsu Sung, Heebom Kim, Ji-hoon Kang, Seunghye Kim, Jin Choi

Proceedings Volume 12751, 127510B (2023) https://doi.org/10.1117/12.2687781

KEYWORDS: Education and training, Machine learning, Data modeling, Algorithm development, Modeling, 3D modeling, Feature extraction, Design and modelling, Artificial neural networks, Optical proximity correction

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