Dr. Sang-Hee Lee
Corporate VP at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Publications (27)

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume PC12956, PC1295605 (2024) https://doi.org/10.1117/12.3009572
KEYWORDS: Extreme ultraviolet, Logic

Proceedings Article | 22 November 2023 Presentation
Kunal Rohilla, David Aupperle, Wenxing Jiang, Seungtak Seo, Sanguk Park, Jongju Park, Jin Choi, Sanghee Lee, Min Choo, Yeonjeong Choi, Paul Chung
Proceedings Volume PC12750, PC127500E (2023) https://doi.org/10.1117/12.3007916
KEYWORDS: Inspection, Reticles, Extreme ultraviolet, Quality control, Manufacturing, Laser systems engineering, Laser manufacturing, Industry, Extreme ultraviolet lithography, Design and modelling

Proceedings Article | 21 November 2023 Presentation + Paper
Soeun Shin, Boram Lee, Sukho Lee, Eok bong Kim, Mina Kim, Jin Choi, Sanghee Lee, Yutaro Sato, Ahmad Syukri, Itaru Ono, Yohei Torigoe
Proceedings Volume 12751, 127510V (2023) https://doi.org/10.1117/12.2687866
KEYWORDS: Extreme ultraviolet, Critical dimension metrology, Scattering, Modeling, Mathematical optimization, Algorithm development, Point spread functions, Lithography, Backscatter, Semiconductors

Proceedings Article | 21 November 2023 Presentation + Paper
Ai Kaneko, Taigo Fujii, Itaru Ono, Ahmad Syukri, Yohei Torigoe, Mincheol Kim, Sukho Lee, Eok Bong Kim, Sanghee Lee
Proceedings Volume 12751, 127510U (2023) https://doi.org/10.1117/12.2686942
KEYWORDS: Printing, Optical proximity correction, Photomasks, Lithography, Industry, Electromagnetic simulation, Deformation

Proceedings Article | 29 September 2023 Paper
Kyungsup Shin, Sunyoung Kim, Jihyeon Choi, Eokbong Kim, Sanghee Lee, Harald Hoeller-Lugmayr, Amir Moqanaki, Annette Schnettelker, Mathias Tomandl, Christof Zillner, Yohei Torigoe, Taigo Fujii, Ryunosuke Miyake, Mizuki Odaka, Issei Masumoto, Masakazu Hamaji
Proceedings Volume 12915, 129150D (2023) https://doi.org/10.1117/12.2683168
KEYWORDS: Extreme ultraviolet, Design and modelling, Electronic design automation, Algorithm development, Mathematical optimization, Data conversion, Product engineering, Optical proximity correction, Nanofabrication, Lithography

Showing 5 of 27 publications
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