Dr. Christian Helke
Research Assistant at Fraunhofer-ENAS
SPIE Involvement:
Publications (10)

Proceedings Article | 9 April 2024 Poster + Paper
Sebastian Schermer, Christian Helke, Balaji Sake, Andrew Zanzal, Patrick Reynolds, Stephen DeMoor, Anja Voigt, Danny Reuter
Proceedings Volume 12956, 129560J (2024) https://doi.org/10.1117/12.3008954
KEYWORDS: Reticles, Etching, Dry etching, Manufacturing, Lens arrays, Grayscale lithography, Photoresist processing, Design, Scanning electron microscopy, Electron beam lithography

Proceedings Article | 13 March 2024 Presentation + Paper
Proceedings Volume 12898, 128980L (2024) https://doi.org/10.1117/12.3002254
KEYWORDS: Etching, Nanoimprint lithography, Reactive ion etching, Glasses, Photoresist processing

Proceedings Article | 12 March 2024 Presentation + Paper
Proceedings Volume 12889, 128890B (2024) https://doi.org/10.1117/12.3000807
KEYWORDS: Etching, Aluminum nitride, Photonic integrated circuits, Silicon, Semiconducting wafers, Waveguides, Laser resonators, Dry etching, Cladding, Wafer level optics

Proceedings Article | 5 October 2023 Paper
M. Reinhardt, C. Helke, S. Schermer, S. Hartmann, A. Voigt, D. Reuter
Proceedings Volume 12802, 128020E (2023) https://doi.org/10.1117/12.2675558
KEYWORDS: Resonators, Electron beam lithography, Design and modelling, Lithography, Photonic integrated circuits, Ultraviolet radiation, Semiconducting wafers, Photoresist processing, Waveguides, Manufacturing

Proceedings Article | 13 March 2023 Presentation + Paper
Julia Wecker, Karla Hiller, Toni Großmann, Susann Hahn, Steffen Kurth, Christian Helke, Matthias Küchler, Danny Reuter, Jörg Martin, Alexander Weiß, Harald Kuhn
Proceedings Volume 12426, 124260M (2023) https://doi.org/10.1117/12.2650524
KEYWORDS: Reflectors, Silicon, Waveguides, Tunable filters, Etching, Actuators, Transmittance, Optical filters, Quantum cascade lasers, Design and modelling

Showing 5 of 10 publications
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