Mr. Holger Conrad Profile

Holger Conrad

Ph.D. Student at Fraunhofer-Institut für Photonische Mikrosysteme

SPIE Involvement:

Author

Area of Expertise:

piezoelectric thin film actuators , piezoresistive sensors , MEMS, MOEMS, MMDM , aluminum nitride , technology and material development , device simulation

Websites:

Company Website

Publications (5)

Proceedings Article | 28 February 2020 Paper

Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation

Anton Melnikov, Hermann A. G. Schenk, Franziska Wall, Barbara Spitz, Lutz Ehrig, Sergiu Langa, Michael Stolz, Bert Kaiser, Holger Conrad, Harald Schenk

Proceedings Volume 11293, 112930D (2020) https://doi.org/10.1117/12.2551271

KEYWORDS: Actuators, Finite element methods, Silicon, Microelectromechanical systems, Solids, Capacitors, Differential equations, Complex systems, Acoustics

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Proceedings Article | 20 February 2017 Presentation + Paper

A contribution to the expansion of the applicability of electrostatic forces in micro transducers

Harald Schenk, Holger Conrad, Matthieu Gaudet, Sebastian Uhlig, Bert Kaiser, Sergiu Langa, Michael Stolz, Klaus Schimmanz

Proceedings Volume 10116, 1011603 (2017) https://doi.org/10.1117/12.2249575

KEYWORDS: Actuators, Transducers, Microelectromechanical systems, Electrodes, Semiconducting wafers, Surface micromachining, Field emission displays, Silicon, Etching, Aluminum

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Proceedings Article | 14 February 2011 Paper

Integrated piezoresistive position detection for electrostatic driven micro scanning mirrors

Jan Grahmann, Thomas Graßhoff, Holger Conrad, Thilo Sandner, Harald Schenk

Proceedings Volume 7930, 79300V (2011) https://doi.org/10.1117/12.874979

KEYWORDS: Sensors, Mirrors, Resistance, Bridges, Micromirrors, Piezoresistive sensors, Silicon, Resistors, Doping, Crystals

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Proceedings Article | 19 May 2009 Paper

Aluminium nitride: a promising and full CMOS compatible piezoelectric material for MOEMS applications

Holger Conrad, Jan Uwe Schmidt, Wolfram Pufe, Fabian Zimmer, Thilo Sandner, Harald Schenk, Hubert Lakner

Proceedings Volume 7362, 73620J (2009) https://doi.org/10.1117/12.821715

KEYWORDS: Aluminum nitride, Silicon, Semiconducting wafers, Thin films, Sputter deposition, Finite element methods, X-ray diffraction, Microopto electromechanical systems, Crystals, Diffraction

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Proceedings Article | 19 February 2009 Paper

Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer

Jan Grahmann, Holger Conrad, Thilo Sandner, Thomas Klose, Harald Schenk

Proceedings Volume 7208, 720808 (2009) https://doi.org/10.1117/12.808151

KEYWORDS: Mirrors, Sensors, Micromirrors, Resistance, Transformers, Piezoresistive sensors, Position sensors, Silicon, Bridges, Wheatstone bridges

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