Holger Conrad
Ph.D. Student at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Author
Area of Expertise:
piezoelectric thin film actuators , piezoresistive sensors , MEMS, MOEMS, MMDM , aluminum nitride , technology and material development , device simulation
Websites:
Publications (4)

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Actuators, Etching, Electrodes, Silicon, Transducers, Aluminum, Field emission displays, Semiconducting wafers, Surface micromachining

PROCEEDINGS ARTICLE | February 14, 2011
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Mirrors, Sensors, Crystals, Silicon, Resistance, Doping, Micromirrors, Bridges, Resistors, Piezoresistive sensors

PROCEEDINGS ARTICLE | May 19, 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Thin films, Diffraction, Sputter deposition, Crystals, X-ray diffraction, Silicon, Microopto electromechanical systems, Finite element methods, Aluminum nitride, Semiconducting wafers

PROCEEDINGS ARTICLE | February 19, 2009
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Mirrors, Transformers, Sensors, Silicon, Resistance, Micromirrors, Bridges, Position sensors, Piezoresistive sensors, Wheatstone bridges

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