Dr. Jeroen Huijbregste
at ASML Netherlands BV
SPIE Involvement:
Publications (4)

Proceedings Article | 27 May 2009 Paper
Joseph Gordon, Marianna Silova, Brid Connolly, Jeroen Huijbregtse, Nicolae Maxim, Larry Frisa, Christian Chovino, Colleen Weins
Proceedings Volume 7470, 74700C (2009) https://doi.org/10.1117/12.835174
KEYWORDS: Air contamination, Reticles, Photomasks, Pellicles, Humidity, Lithography, Contamination, Manufacturing, Contamination control, Optical lithography

Proceedings Article | 1 April 2009 Paper
Nicolae Maxim, Frances Houle, Jeroen Huijbregtse, Vaughn Deline, Hoa Truong, Willem van Schaik
Proceedings Volume 7273, 72733Z (2009) https://doi.org/10.1117/12.813726
KEYWORDS: Silicon, Polymers, Nitrogen, Carbon, Semiconducting wafers, Calibration, Ultraviolet radiation, Sensors, Lithography, Photoresist materials

Proceedings Article | 2 June 2003 Paper
Jeroen Huijbregste, Richard van Haren, Andre Jeunink, Paul Hinnen, Bart Swinnen, Ramon Navarro, Geert Simons, Frank van Bilsen, Hoite Tolsma, Henry Megens
Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.482814
KEYWORDS: Optical alignment, Semiconducting wafers, Aluminum, Overlay metrology, Chemical mechanical planarization, Spatial frequencies, Signal processing, Copper, Scanning probe microscopy, Sensors

Proceedings Article | 6 September 2000 Paper
John Markert, Troy Messina, Bernard Dam, Jeroen Huijbregste, Jan Rector, Ronald Griessen
Proceedings Volume 4058, (2000) https://doi.org/10.1117/12.397832
KEYWORDS: Oxygen, Superconductors, X-ray diffraction, X-rays, Thin films, Atomic force microscopy, Strontium, Doping, Laser ablation, Solids

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