Dr. Kevin E. Cooper
Dean, Advanced Technology at Indian River State College
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Metals, Copper, Silicon, Optical alignment, Scanning probe microscopy, Semiconducting wafers, Overlay metrology, Chemical mechanical planarization, Back end of line, Front end of line

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