Prof. Liang-Chia Chen
Distiguished Professor at National Taiwan Univ
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Author
Publications (18)

Proceedings Article | 15 August 2023 Presentation + Paper
Proceedings Volume 12618, 1261805 (2023) https://doi.org/10.1117/12.2673608
KEYWORDS: Reflectivity, Thin films, Scatterometry, Film thickness, Polarization, Artificial neural networks, Spectroscopy

Proceedings Article | 10 August 2023 Presentation + Paper
Proceedings Volume 12619, 126190H (2023) https://doi.org/10.1117/12.2673318
KEYWORDS: Model-based design, Scatterometry, Metrology, Critical dimension metrology, Beam shaping, Diffraction

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124961G (2023) https://doi.org/10.1117/12.2658216
KEYWORDS: Point spread functions, Deconvolution, Databases, Imaging systems, Image deconvolution, Super resolution, Image processing, Diffraction limit, Convolution, Education and training

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124961A (2023) https://doi.org/10.1117/12.2658279
KEYWORDS: Finite-difference time-domain method, Education and training, Metrology, Scanning electron microscopy, Packaging, Manufacturing, Computer simulations, Tolerancing, Semiconductors, Scatterometry

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124960E (2023) https://doi.org/10.1117/12.2657642
KEYWORDS: Artificial neural networks, Scatterometry, Deep ultraviolet, Data modeling, Scanning electron microscopy, Particle swarm optimization, Systems modeling, Reflection, Finite-difference time-domain method, Statistical modeling

Showing 5 of 18 publications
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