Dr. Meghali C. Chopra
CEO at SandBox Semiconductor
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12499, 1249907 (2023) https://doi.org/10.1117/12.2662423
KEYWORDS: Semiconducting wafers, Metrology, Image segmentation, 3D modeling, Etching, Critical dimension metrology, Artificial intelligence, 3D metrology, Scanning electron microscopy, Image processing

Proceedings Article | 26 May 2022 Poster + Paper
Proceedings Volume 12053, 1205327 (2022) https://doi.org/10.1117/12.2614282
KEYWORDS: Scanning electron microscopy, Image segmentation, Artificial intelligence, Image processing, Process engineering, Image analysis, Wet etching, Semiconductors, Neural networks, Metals

Proceedings Article | 25 May 2022 Poster + Paper
Proceedings Volume 12056, 120560E (2022) https://doi.org/10.1117/12.2614301
KEYWORDS: Etching, Calibration, Data modeling, Surface roughness, Process modeling, Photomasks, Extreme ultraviolet, Artificial intelligence, Deposition processes, Optimization (mathematics)

Proceedings Article | 25 May 2022 Presentation + Paper
Kara Kearney, Leandro Medina, Roger Bonnecaze, Meghali Chopra
Proceedings Volume 12056, 1205608 (2022) https://doi.org/10.1117/12.2614284
KEYWORDS: Etching, Calibration, Artificial intelligence, Data modeling, Deposition processes, Physics, Machine learning, Optimization (mathematics), Semiconductors, Tolerancing

Proceedings Article | 22 February 2021 Presentation + Paper
Yang Ban, Kara Kearney, Bryan Sundahl, Leandro Medina, Roger Bonnecaze, Meghali Chopra
Proceedings Volume 11615, 116150L (2021) https://doi.org/10.1117/12.2583868
KEYWORDS: Process modeling, Etching, Optimization (mathematics), Model-based design, 3D modeling, Calibration, Statistical modeling, Statistical analysis, Space mirrors, Process engineering

Showing 5 of 17 publications
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