Prof. John G. Ekerdt
at Univ of Texas at Austin
SPIE Involvement:
Publications (16)

Proceedings Article | 24 February 2017 Presentation + Paper
Edward Lin, Shen Hu, John Ekerdt
Proceedings Volume 10105, 1010519 (2017)
KEYWORDS: Perovskite, Atomic layer deposition, Silicon, Germanium, Semiconductors, Oxides, Functional oxides, Heteroepitaxy, Annealing, Lanthanum, Oxygen, Crystals

Proceedings Article | 16 March 2016 Paper
Proceedings Volume 9781, 978111 (2016)
KEYWORDS: Etching, Plasma, Data modeling, Plasma etching, Dry etching, Magnesium, Oxides, Chemistry, Optimization (mathematics), Bayesian inference, Calibration, Ions, Autoregressive models, Electrons, Statistical modeling

Proceedings Article | 8 March 2014 Paper
Thong Ngo, Martin McDaniel, Agham Posadas, Alexander Demkov, John Ekerdt
Proceedings Volume 8987, 898712 (2014)
KEYWORDS: Crystals, Atomic layer deposition, Annealing, Lanthanum, Interfaces, Silicon, X-rays, Aluminum, X-ray diffraction, Diffraction

SPIE Journal Paper | 1 July 2008
Michael Lin, Daniel Hellebusch, Kai Wu, Eui Kim, Kuan-Hsun Lu, Kenneth Liechti, John Ekerdt, Paul Ho, C. Grant Willson
JM3, Vol. 7, Issue 03, 033005, (July 2008)
KEYWORDS: Polymers, Interfaces, Quartz, Adhesives, Etching, Liquids, Silicon, Lithography, Mechanics, Natural surfaces

Proceedings Article | 20 March 2008 Paper
Michael Lin, Daniel Hellebusch, Kai Wu, Eui Kyoon Kim, Kuan Lu, Li Tao, Kenneth Liechti, John Ekerdt, Paul Ho, Walter Hu, C. Grant Willson
Proceedings Volume 6921, 69210E (2008)
KEYWORDS: Polymers, Quartz, Interfaces, Etching, Mechanics, Lithography, Liquids, Adhesives, Silicon, Polymer thin films

Showing 5 of 16 publications
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