Prof. Roger T. Bonnecaze
Professor at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (12)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Etching, Argon, Chemical species, Ions, Silicon, Surface roughness, Chlorine, Focus stacking software, Plasma

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Data modeling, Databases, Etching, Argon, Particles, Plasma etching, Autoregressive models, Plasma systems, Temperature metrology, Plasma

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Data modeling, Calibration, Etching, Argon, Ions, Chemistry, Autoregressive models, Systems modeling, Model-based design, Plasma

PROCEEDINGS ARTICLE | March 21, 2017
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Diffractive optical elements, Data modeling, Calibration, Etching, Sputter deposition, Ions, Chemistry, Physics, Plasma etching, Parallel computing, Semiconducting wafers, Plasma systems, Process engineering, Plasma, Anisotropy

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Oxides, Magnesium, Data modeling, Calibration, Etching, Dry etching, Electrons, Ions, Chemistry, Plasma etching, Optimization (mathematics), Autoregressive models, Statistical modeling, Plasma, Bayesian inference

SPIE Journal Paper | October 21, 2015
JM3 Vol. 14 Issue 04
KEYWORDS: Etching, Polymers, Diamond, Nanoimprint lithography, Distortion, Anisotropic etching, Oxides, Image processing, 3D modeling, 3D image processing

Showing 5 of 12 publications
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